1. Vader

2. Palpatine

3. Maul

4. Dooku

5. Grievous

6. Kylo

Maul would be 1. Kylo would be last.

Vader is my #1. One of the most iconic villains ever.

I'd rank them, from most to least favorite:

1. Sidious

2. Dooku

3. Vader

4. Grievous

5. Maul

6. Ren

Personally I like Darth Vader

Hard one but ofc my master palpatine bit Ben dooku and maul and Vader are great